| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad78b36d08c20f06075145cc1caf3ac8 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C31-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C31-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-448
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C211-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C211-04 |
| filingDate |
2004-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67f9b63491d3f40556331d6efc04c882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e042cb23ac17d636873b01873e460f5 |
| publicationDate |
2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006045083-A |
| titleOfInvention |
Thin film forming raw material, thin film manufacturing method and metal compound |
| abstract |
PROBLEM TO BE SOLVED: To provide a thin film forming raw material that can form a thin film with good film forming efficiency while preventing particle contamination, and particularly suitable for a thin film manufacturing method having a vaporization step such as a CVD method including an ALD method. To do. A thin film forming raw material comprising a metal compound represented by the following general formula (I). [Chemical 1] [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011127122-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8357815-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102562274-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013538792-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012138332-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009173587-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112004959-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7491654-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220087046-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101569138-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8633329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009093366-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8404878-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9087690-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3783130-A4 |
| priorityDate |
2004-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |