| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-963
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12736
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-6584
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-724
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-668 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-62655
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 |
| filingDate |
2004-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98a5655f9d3dad1894493a2b3dc75374
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45a5fecc3220078ad6feebf38b89e8a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84f87b9f193835411898eb9ca380d37e |
| publicationDate |
2006-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006044980-A |
| titleOfInvention |
Aluminum nitride sintered body |
| abstract |
PROBLEM TO BE SOLVED: To provide a susceptor excellent in heat uniformity by reducing pores in an aluminum nitride sintered body as much as possible. The aluminum nitride sintered body of the present invention controls the amount of bismuth and chlorine contained to a certain value or less. That is, the aluminum nitride sintered body containing aluminum nitride as a main component is characterized in that the bismuth content in the aluminum nitride sintered body is 30 ppm or less and the chlorine content is 100 ppm or less. A resistance heating element is preferably formed on the aluminum nitride sintered body, and is preferably used as a semiconductor heating component. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012191241-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7038496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019016676-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011241117-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019031434-A |
| priorityDate |
2004-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |