http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006036890-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f8cfa5aee4410611b5c562275c9f8e3 |
classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07B61-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D307-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2004-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ba131b2c77fe31cf6d6b6c92d9e0465 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12154543c380e8529093de7c6af5a7ae |
publicationDate | 2006-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2006036890-A |
titleOfInvention | β-carboxy-α-unsaturated acyloxy-γ-butyrolactone derivative, polymer compound and photoresist resin composition |
abstract | PROBLEM TO BE SOLVED: To provide a compound having a novel lactone skeleton useful as a constituent monomer of a resin for photoresist. The following formula (1) [Chemical 1] (In the formula, R a represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 6 carbon atoms, or a haloalkyl group having 1 to 6 carbon atoms. R 1 and R 2 are the same or different and represent a hydrocarbon group. R 1 and R 2 may be bonded to each other to form a ring together with adjacent carbon atoms. R 3 and R 4 may be the same or different and each represents a hydrogen atom or a hydrocarbon group) A β-carboxy-α-unsaturated acyloxy-γ-butyrolactone derivative represented by the formula: [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007332284-A |
priorityDate | 2004-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 178.