http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006032924-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2005-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90a374176e49b6949d98fca23538a820 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89ce31d3641e61d30984549171309fd4 |
| publicationDate | 2006-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006032924-A |
| titleOfInvention | Method for manufacturing semiconductor device |
| abstract | PROBLEM TO BE SOLVED: To control a crystal lateral growth position of a semiconductor film without making the apparatus complicated. A semiconductor film is formed on an insulating substrate, a reflective film made of an insulating film is formed on a part of the semiconductor film, and exposed by irradiating laser light using the reflective film as a mask. The semiconductor film is crystallized. In the structure of the invention described above, the reflective film has a structure in which insulating films having a high refractive index and insulating films having a low refractive index are alternately stacked. Specifically, it is characterized by comprising a silicon oxide film and a silicon nitride film formed on and in contact with the silicon oxide film. More preferably, a reflective film is formed by stacking several layers of a silicon oxide film and a silicon nitride film. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011151382-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009181971-A |
| priorityDate | 2004-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.