http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006025367-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-17 |
| filingDate | 2004-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7770c0840d7b4a41fa3be89cd7f9d7c7 |
| publicationDate | 2006-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006025367-A |
| titleOfInvention | Thin film bulk acoustic resonator and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED To improve electrical characteristics, improve quality, and increase productivity by suppressing lateral resonance vibration. SOLUTION: An insulating substrate 2, a first electrode layer 4 formed by laminating and forming a cavity 3 on a main surface 2a thereof, a piezoelectric layer 5, and a second electrode layer 6 are provided, and a second electrode An opening shape having a center O2 that is biased outward from the center O1 in the layer 6 and that opens with the piezoelectric layer 5 facing outward, and forms a non-parallel opposing side with the outer peripheral edge of the second electrode layer 2 The pseudo resonance control opening 11 is formed. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110868184-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008022305-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110114971-A |
| priorityDate | 2004-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449871035 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166598 |
Total number of triples: 20.