http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006024796-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b434d7df701edeee249e68337cfe859e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268 |
| filingDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09834271f8abce0622a5fafd81bf752b |
| publicationDate | 2006-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006024796-A |
| titleOfInvention | Light irradiation apparatus, crystallization apparatus, crystallization method, and device |
| abstract | A crystallization apparatus capable of simultaneously performing crystallization of a semiconductor film and formation of alignment marks around the crystallization region. An optical modulation element (1) having a phase region for phase-modulating an incident light beam and two incoherent light beams that are incident in a predetermined polarization state via the phase region (1a) of the optical modulation element. A beam splitting element (2E) for splitting into two, an imaging optical system for forming a predetermined light intensity distribution on a predetermined plane based on the light flux through the beam splitting element, and a phase region other than the phase region of the optical modulation element Polarization state setting means (7, 8, 9) for setting the polarization state of the light beam incident on the light beam splitting element via the specific region (1b) to a polarization state that is not substantially split by the light beam splitting element. ing. [Selection] Figure 7 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016183957-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007311479-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021094421-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007281444-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11642004-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017158764-A |
| priorityDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.