| abstract |
PROBLEM TO BE SOLVED: To provide a device for containing and distributing a high-purity fluid capable of preventing backflow from an inner container to an outer container. An outer container (10) capable of containing a large amount of high-purity fluid therein, an outlet (4) associated with the outer container (10) for distributing the high-purity fluid, and the outer container through the outlet (4). A valve 3 capable of controlling the flow rate of the high-purity fluid exiting from 10, and an inner side that is at least partially located in the outer container 10, communicates with the outlet 4, and communicates with the interior of the outer container 10. A container 9, a purification medium 7 for purifying the high-purity fluid contained in the inner container 9 and containing undesirable components, and a high-purity fluid from the inner container 9 into the outer container 10. And a flow rate control device for preventing the liquid from flowing out. [Selection] Figure 1 |