| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2004-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670fbf340840ebaff8a02449b58cdbcb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_033c2c700dc9100546bd1d53d78ee9c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8bf49d5b78bfca08a668c2efced2ed1 |
| publicationDate |
2006-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006013267-A |
| titleOfInvention |
Organic lanthanum compound and method for producing lanthanum-containing film using the compound |
| abstract |
An organic lanthanum compound having a high growth rate and excellent flatness of a formed film, a solution raw material, and a method for producing a lanthanum-containing film are provided. The organic lanthanum compound of the present invention is a raw material for metal organic chemical vapor deposition, and has only one to three kinds selected from the group consisting of a cyclopentadienyl group and a substituent thereof as a functional group. Or a functional group selected from the group consisting of a cyclopentadienyl group and a substituent thereof and only a functional group selected from the group consisting of an amino group and a substituent thereof. It is characterized in that it is coordinated to a lanthanum element, or only one to three kinds selected from the group consisting of an amino group and a substituent thereof as a functional group are coordinated to a lanthanum element. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10752645-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10329312-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009122361-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010505002-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11312730-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009122361-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109906228-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190082872-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I776823-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102470237-B1 |
| priorityDate |
2004-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |