abstract |
A silicone resin having the general formula (R 1 SiO 3/2 ) y , wherein R 1 is an alkyl group having 8 to 24 carbon atoms; x has a value of 0.05 to 0.7 Y has a value of 0.3 to 0.95, and x + y = 1. The resin is used to form a porous ceramic material and a porous thin film on a semiconductor device. |