http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005329479-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N37-00 |
filingDate | 2004-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_629b4fc09ce39ab167a9cb0085c9e887 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f049358f2240179814bb0a894f5a11a7 |
publicationDate | 2005-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2005329479-A |
titleOfInvention | Manufacturing method of microreactor |
abstract | A method of manufacturing a microreactor capable of manufacturing a microreactor in which a substrate on which a flow path of a micrometer order or less is accurately formed is accurately stacked without causing distortion or the like is provided. A step of forming a resist film made of a photo-curing resin composition, a step of irradiating the resist film with light through a pattern in which a target channel portion is shielded from light, and a light irradiation portion Has a sufficient resistance to a developing solution and is cured to such an extent that the adhesive strength is not lost, the step of developing the resist film irradiated with the light to form a flow path, and the light irradiated portion is completely A process for producing a microreactor, comprising: a step of laminating and adhering a resist film on which the flow path is formed with another layer before being cured to lose adhesion. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010070614-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015012212-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10272426-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111039785-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3085661-A1 |
priorityDate | 2004-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 502.