http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005326542-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B3-00 |
| filingDate | 2004-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f8a1332b55b200f04a93961b316e494 |
| publicationDate | 2005-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005326542-A |
| titleOfInvention | Microlens structure and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To produce a microlens having a highly accurate lens shape with fine dimensions and pitch without performing a heat flow or etchback process, and a manufacturing method of the microlens manufactured with low cost and good reproducibility, and those microlenses And a micromachine using the silicon structure. A microlens structure having a microlens on the surface of a silicon substrate, wherein the silicon substrate surface of the microlens forming portion forms a recess, and boron is higher on the silicon substrate surface other than the recess than the recess. The boron is characterized by being diffused to a concentration, and the boron is diffused at a concentration of 1 × 10 19 atoms / cm 3 or more. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7957048-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014065862-A |
| priorityDate | 2004-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 79.