http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005314243-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C309-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2004-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50c05e1481593cf7a7f31bbf076799e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcc1217353063f827eadb911fe675e72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcc708158e02e6d753bac2b30a5fa1ca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1512e632b2dd75442d3e4f65473c85eb |
| publicationDate | 2005-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005314243-A |
| titleOfInvention | Naphthoquinone diazide sulfonic acid ester, positive photosensitive resin composition and semiconductor device or display element using the same. |
| abstract | A positive photosensitive resin composition having high sensitivity and high resolution having characteristics such as little film loss, no deformation of pattern shape, and no remaining photosensitive resin composition (scum) in an exposed area. To provide. SOLUTION: 100 parts by weight of an alkali-soluble resin (A) and 1,2-naphthoquinone-2-diazide-5-sulfonic acid ester and / or 1,2-naphthoquinone of a phenol compound represented by the general formula (1) A positive photosensitive resin composition comprising 1 to 50 parts by weight of 2-diazide-4-sulfonic acid ester (B). Embedded image |
| priorityDate | 2004-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 79.