| abstract |
The present invention provides a sublimation purification apparatus and a sublimation purification method with improved purification yield and operability of chemical substances. A sublimation purification apparatus having a purification section having a vaporization section for vaporizing a chemical substance and a collection section for collecting the vaporized chemical substance, and an exhaust apparatus, wherein the height Ha of the vaporization section is Sublimation purification apparatus characterized in that the height Hb of the collection part is Ha> Hb, or a purification part having a vaporization part for vaporizing a chemical substance and a collection part for collecting the vaporized chemical substance And a sublimation purification apparatus having an exhaust device, wherein the purification section has a collection inner pipe for collecting the chemical substance, and the inner area S1 of the collection inner pipe and the inner area S2 of the collection section outer pipe are Sublimation purification apparatus and sublimation purification method using the apparatus, wherein S1 ≧ S2. [Selection figure] None |