http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005309407-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2005-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd8ad4f4ee86ce1f784859c131499d4d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5756d88bd4de1b02e40fcc310564b566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc7492f0aa84e6b694ba45e3642fdf2d |
| publicationDate | 2005-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005309407-A |
| titleOfInvention | Chemically amplified positive resist composition |
| abstract | 【Task】 Provided is a positive resist composition that is capable of resolving a minute contact hole pattern with little reduction in sensitivity and at the same time having various resist performances such as roundness and pattern shape. [Solution] A polymer unit having an acid labile group, which itself is insoluble or hardly soluble in an alkaline aqueous solution, but becomes soluble in an alkaline aqueous solution by the action of an acid, an acid generator, and the following formula ( A chemically amplified positive resist composition comprising a compound represented by C-1). (C-1) (In the formula, R 1 and R 2 are .R 3 to R 5 representing an optionally branched alkyl group having a hydrogen atom or 1 to 4 carbon atoms independently of one another, represent a hydrogen atom or a hydroxyl group independently of one another .) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7491484-B2 |
| priorityDate | 2004-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 233.