| abstract |
A small and inexpensive surface plasmon resonance sensor device is provided. A semiconductor laser unit is a vertical cavity surface emitting laser. The sensor unit 20 includes a dielectric film 22 provided on the second multilayer reflective film 15, a metal film 23 provided thereon, and a receptor 26 fixed on the surface thereof. On the upper surface of the dielectric film 22, a grating made of concentric concavities and convexities is provided, and a metal film 23 is formed along the surface. A receptor 26 is bonded to the uneven surface of the metal film 23. The metal film 23 has an opening at the center. An optical fiber probe 27 is provided in the vicinity of the opening 24, and near-field light 25 leaking from the opening 24 is detected. [Selection] Figure 1 |