http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005307321-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cdd94f212dc7aef02fc1dcf28fa9b4fd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 2004-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04bb4340db1eca700fb6687862828d4e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf75ca8d996d78426adecdd32f072bdb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf28c47db773c36db71b917c4f8094d5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac04fd553cd12e14497ec88bab066b5f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50c4cf4cebe4e9a1cd3a415c9726dfb4 |
| publicationDate | 2005-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005307321-A |
| titleOfInvention | Thin film forming apparatus and thin film forming method |
| abstract | PROBLEM TO BE SOLVED: To provide a thin film forming apparatus and a thin film forming method capable of obtaining a dense and uniform thin film and having a high film forming speed. A method of forming a thin film, comprising: a voltage applying means for applying a voltage; a discharge space formed by the voltage applying means; and a gas introducing means for allowing a discharge gas and a reactive gas to flow into the discharge space. The discharge gas is supplied from behind the reactive gas to the substrate on which film formation is performed, and the reactive gas is brought into contact with the substrate to form a film. The reactive gas supplied to the discharge space has a flow velocity V (m / sec), 0.5 ≦ V ≦ 10 A method of forming a thin film, wherein the thin film is configured to move on the surface of the substrate at a speed of 5 mm. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011179104-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014060032-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013044542-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009032651-A |
| priorityDate | 2004-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.