| abstract |
PROBLEM TO BE SOLVED: To provide a ceramic backing material having high mechanical strength and excellent thermal shock resistance. A ceramic backing material obtained by molding and sintering ceramic powder, wherein the ceramic powder is mainly composed of SiO 2 powder particles having a particle size in the range of 90 to 150 mesh, and the ceramic backing material is the overall 100 wt%, SiO 2: 75 to 95 wt%, Al 2 O 3: 2~15 wt%, MgO: 1 to 5 wt%, Na 2 O and / or K 2 O: 0.3 to It is a ceramic backing material containing 2% by weight and moisture: 0.01 to 0.5% by weight, the balance being impurities that are inevitably mixed. [Selection figure] None |