| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1c5a7da07dba83982ab2dd124e93f52e |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N19-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00 |
| filingDate |
2004-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f7997e8ec83afff794cb6497c358c26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf7aa9de23c02e3397bd0fb999f200a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e543b8b43695ffac2cae6bf377626fb9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c99610d79a658407a7617965910508a |
| publicationDate |
2005-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005300273-A |
| titleOfInvention |
measuring device |
| abstract |
The present invention provides a measuring apparatus capable of measuring the adhesion strength at the interface between a substrate and a film or a layered body formed on the substrate with high accuracy. A measuring apparatus for measuring the adhesion strength of an interface between a film or a layered body attached to one surface of a base material and the base material and disposed on the other surface of the base material. The shock wave generating unit 5 that generates a shock wave by a breakdown phenomenon when irradiated with the pulse laser beam, the laser device 2 that irradiates the shock wave generating unit 5 with the pulse laser beam, and the shock wave generating unit 5 from the laser device 2 The detection unit 5 detects a signal indicating the adhesion strength at the interface between the base material 41 and the film or the layered body 42 by the shock wave generated by the shock wave generation unit 5 generated when the laser beam is irradiated with the pulse laser beam, and the detection unit 5 detects A control unit 69 of the PC 6 that calculates the adhesion strength based on the signal is provided. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109425568-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102667442-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102667442-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10048230-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014153359-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103983690-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015073137-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008203185-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103983690-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9354203-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101936876-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109917007-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109917007-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112147071-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112697698-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109425568-A |
| priorityDate |
2004-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |