| abstract |
PROBLEM TO BE SOLVED: To provide a method for producing a tantalum region composed of two phases. The method of the present invention comprises a first layer region (224, 324, 524) of a first layer (222, 420) and a second layer region of a second layer (220). Creating a tantalum structure comprising creating a tantalum layer (230, 330, 430, 530) disposed on the tantalum layer, wherein the tantalum layer is substantially of a bcc phase on the first layer region. The method is a tantalum region (234, 334, 434, 534) and the tantalum layer is a non-bcc phase tantalum region (232, 332, 432, 532) on the second layer region. [Selection] Figure 4 |