http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005296736-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a96ec75a6f70c768cce4ae3cea0aea6d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B09B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B09B5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B20-00 |
| filingDate | 2004-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99204627fe1009f3bcfb38e74ec983e7 |
| publicationDate | 2005-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005296736-A |
| titleOfInvention | Reprocessing method for quartz glass jig |
| abstract | A quartz glass jig tool that has been used can be easily regenerated. A sorting unit 30 collects a waste product 20 such as a quartz glass jig tool discarded by a user 10 as a semiconductor manufacturing company, detects impurities adhering to the quartz glass jig tool, and detects the detected impurities. According to the classification, the waste products 20 are classified and assigned to the corresponding ones of the recycling factories 40-1 to 40-7, and the recycling factories 40-1 to 40-7 corresponding to the respective impurities are discarded from the sorting processing unit 30. 20, the impurities attached to the waste product 20 are removed and recycled, and the shipping inspection precision cleaning unit 50 confirms whether or not the impurities are attached to the recycled products shipped from the recycling factories 40-1 to 40-7. After inspecting and performing precision cleaning, it is shipped to the user 10. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007307478-A |
| priorityDate | 2004-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.