http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005294805-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca281a36dc88c033ae84728f46ecd5a3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K1-03 |
| filingDate | 2005-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63cc1481bd89e8e14e93c3487666dfc3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72ae78d95ead9e96d6a549425893dca0 |
| publicationDate | 2005-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005294805-A |
| titleOfInvention | Aluminum nitride surface treatment method and surface treated aluminum nitride |
| abstract | An oxide layer excellent in water resistance, moisture resistance, chemical resistance, and plasma resistance is coated on an aluminum nitride surface uniformly and continuously without having discontinuities such as voids. An object of the present invention is to provide a surface treatment method of aluminum nitride and a surface-treated aluminum nitride which can easily and quickly process a sintered body and / or powder of aluminum nitride which has solved the problems. A surface treatment agent containing at least one kind of fine particles selected from metals and metal oxides having an average primary particle diameter of 3 to 500 nm and metal ions is applied to the surface of an aluminum nitride base material. The surface treatment agent and the aluminum nitride base material are chemically reacted by firing in the presence of oxygen to form a continuous oxide layer composed of at least an aluminate on the surface of the base material. It exists in the surface treatment method of the aluminum nitride whose film thickness of a layer is 0.1-70 micrometers. [Selection figure] None |
| priorityDate | 2004-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 91.