| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0115 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J5-10 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-02 |
| filingDate |
2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a11ae951a32281621c6acfc313b715f |
| publicationDate |
2005-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005279928-A |
| titleOfInvention |
How to close a perforated diaphragm |
| abstract |
A method of forming a diaphragm structure having a closed perforated opening is provided which improves upon the disadvantages of the prior art. At least one microporous layer (2) is formed on a substrate (1), and at least a microporous layer is formed in the substrate (1) by an etching process that penetrates the microporous layer. A hollow chamber (6) covered with a layer (2) is formed under the microporous layer (2), a closed layer (5) is formed in the microporous layer, and the closed layer (5) At least partially covering the microporous layer (2). [Selection] Figure 5 |
| priorityDate |
2004-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |