http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005268780-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dca153f19868f747eeea612b047a9e7c
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-109
filingDate 2005-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de70bfdc372cf65456d37b103173fa2d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8196a48d306a90dc9ff8a1933284c284
publicationDate 2005-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2005268780-A
titleOfInvention Harmonic generator, laser annealing apparatus, and harmonic generation method
abstract PROBLEM TO BE SOLVED: To provide a harmonic generator capable of increasing wavelength conversion efficiency. A laser light source emits a laser beam. The first and second reflecting mirrors are arranged so as to face each other. The laser beam emitted from the laser light source enters the other reflecting mirror through the side of one reflecting mirror, and the incident laser beam reciprocates between the first reflecting mirror and the second reflecting mirror. A wavelength conversion element is disposed at a position where a laser beam reciprocating between the first reflecting mirror and the second reflecting mirror passes. The wavelength conversion element emits a harmonic beam in which the wavelength of the incident laser beam is converted and an unconverted wavelength beam that has not been wavelength-converted. Both the first reflecting mirror and the second reflecting mirror reflect the wavelength unconverted beam, and at least one of the reflecting mirrors transmits the harmonic beam. [Selection] Figure 2
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8068274-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8339697-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009044517-A1
priorityDate 2005-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408

Total number of triples: 17.