| abstract |
There is provided a burn-in device capable of reliably adjusting the temperature of a large number of electronic components having different self-heat generation amounts to a predetermined temperature at the same time. A heater block 420a having a heater 421a, a cooling block 410a having flow paths 411a to 413a capable of circulating a refrigerant, and a sensor block 430a having a temperature sensor 431a are mounted on a burn-in board 200. A burn-in apparatus that simultaneously performs a burn-in test on the plurality of DUTs while contacting the plurality of DUTs, wherein a first housing space 415a and a second housing space 416a are formed in the cooling block 410a , and a heater The block 420a is housed in the first housing space 415a while maintaining a space between the block 420a and the inner wall surface, and the sensor block 430a is the second housing space while maintaining a space between the block 420a and the inner wall surface. 416a. [Selection] FIG. |