| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D85-84 |
| filingDate |
2004-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fb6e37fa3a536575ec8cc70ff397966 |
| publicationDate |
2005-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005263264-A |
| titleOfInvention |
Photoresist composition container |
| abstract |
The present invention relates to a photoresist composition, particularly a photoresist composition containing a quinonediazide-based and / or benzophenone-based photosensitive component. Provided is a container for a photoresist composition having high low contamination characteristics. The average number of fine particles having a particle diameter of more than 0.3 μm derived from plastic, which is a material for forming a container present in the photoresist composition after 6 months of storage of the photoresist composition, is 30.0 / Set to mL or less. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10047244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150034122-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016044241-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102017360-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102455595-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017179286-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015011292-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102018121-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160023564-A |
| priorityDate |
2004-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |