http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005259902-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed62b7551998e54b35784cdbbb2778d5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2004-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eef61471c823ceaa4964e86de3b40eda http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cd6b016d22ffd30936dc10b2e7aae7a |
| publicationDate | 2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005259902-A |
| titleOfInvention | Substrate processing equipment |
| abstract | A substrate processing apparatus capable of improving the in-plane uniformity of substrate processing is provided. SOLUTION: At least two processing furnaces 202, 137 and substrate mounting means for mounting a wafer 200 in each processing furnace are provided, and after the processing of a substrate in one processing furnace 202 is completed, the other processing is performed. A substrate processing apparatus that carries a wafer 200 into a furnace 137 and executes the processing, and then processes the wafer 200 in one processing furnace 202, and the wafer when the preceding processing is performed in one processing furnace 202 The orientation of the wafer 200 with respect to the substrate mounting means 200 and the orientation of the wafer 200 with respect to the substrate placing means when processing in the one processing furnace 202 are different by rotating the wafer 200 in the other processing furnace 137. Make it. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7350035-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11574825-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1762851-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106067433-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017005242-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101606454-B1 |
| priorityDate | 2004-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.