http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005257693-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86df70be6baafcc380c5c26c307c005b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2005-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef2d8fa5c2b5a9be6d31490e91dca6f0 |
| publicationDate | 2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005257693-A |
| titleOfInvention | Manufacturing method of probe unit |
| abstract | PROBLEM TO BE SOLVED: To provide a method for manufacturing a probe unit excellent in dimensional stability and durability. A step of forming an opening in a substrate, a step of forming a sacrificial layer in the opening, a step of making the surface of the substrate and the sacrificial layer uniform, and a step of forming a base layer of a probe pin And forming a resist pattern in which an opening corresponding to the beam portion of the probe pin is formed on the sacrificial layer on the base layer, and on the base layer in a portion where the resist is not formed, A step of forming a probe pin by performing plating with a nickel content of 75 wt% or more and 84 wt% or less, a step of removing the resist and unnecessary underlayer, and a step of removing the sacrificial layer; And a step of cutting the substrate. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015016099-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9598784-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101074167-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015030887-A |
| priorityDate | 2005-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.