http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005254637-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_171750900388cc1eb516511793bdb9e2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-135 |
| filingDate | 2004-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96055f0a5c150649b60f10d89b946a18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_737baf818b0dae376f5d0280f749e510 |
| publicationDate | 2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005254637-A |
| titleOfInvention | Water-repellent structure and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To reduce the number of manufacturing steps of a water-repellent structure constituted with a fine uneven shape. When an Al film is formed on the upper surface of a convex portion forming film 11 made of SiO 2 by sputtering to have a film thickness of 8000 to 10,000 mm, Al crystal grains grow greatly, the surface becomes rough and uneven, The surface irregular layer 12 having the convex portion 12a is formed. Next, when the surface uneven film 12 and the protrusion forming film 11 are continuously etched by anisotropic dry etching, the surface unevenness of the surface uneven film 12 is formed on the upper surface side of the etched protrusion forming film 11. Irregularities having a shape corresponding to the shape are formed. In this case, the number of manufacturing steps can be reduced as compared with the photolithography method. When a water-repellent film is formed on the uneven surface thus obtained, a fine uneven water-repellent structure is obtained. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014051355-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8794548-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9637815-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019005951-A |
| priorityDate | 2004-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.