http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005246712-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41M1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41F17-14 |
| filingDate | 2004-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a7b567e56f0247c363164dcdafa3f34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa43537cc246ac48ab82e2e47f9ffc1e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45fb1c404f16b9a4b3f5940259079139 |
| publicationDate | 2005-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005246712-A |
| titleOfInvention | Resist pattern forming method, electronic component manufacturing method, and electronic component |
| abstract | An object of the present invention is to provide a method for forming a resist pattern with excellent formation accuracy, a method for manufacturing an electronic component using the method, and an electronic component. (I) A coating process in which a printing ink composition for an etching resist is applied to a silicon resin surface on a main cylinder to form an ink composition layer; and (II) a plate cylinder having a concavo-convex pattern formed on the surface. Removing the part of the ink composition layer from the silicon resin surface by transferring the ink composition to the convex pattern of the plate cylinder, and (III) the silicon resin surface In the method of forming a resist pattern through each step of the transfer step of transferring the ink composition layer remaining on the substrate, the concave pattern width W of the plate cylinder and the desired width L of the resist pattern formed corresponding to the concave pattern The above problem was solved by defining the ratio (L / W) to a predetermined numerical range. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104520971-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110116548-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012128480-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012128480-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101389270-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110116548-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101324493-B1 |
| priorityDate | 2004-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 170.