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filingDate 2005-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2005-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2005241647-A
titleOfInvention Detection of small amounts of gaseous species by emission spectroscopy
abstract In particular, concentration values and changes of gas species that are present in small quantities and / or difficult to excite in a gas mixture under investigation without the use of expensive, bulky and difficult-to-operate equipment. It is possible to obtain a reliable index quickly and inexpensively. The present invention is a method and apparatus for detecting a small amount of gaseous species in a mixture by emission spectroscopy with an optical spectrometer, which is emitted by a plasma present in the gaseous mixture to be analyzed. Identifying a mass gas species line exhibiting an amplitude sensitive to the presence of a minor gas species in the light spectrum, and estimating information about the concentration of the minor gas species from the amplitude of the sensitive line, and Providing equipment. This monitors small amounts of gaseous species in real time. [Selection] Figure 1
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