http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005227332-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
filingDate | 2004-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_201abdae12f920f7b848ecd29a09137f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d03ae680b24404410ab5dd85518cc5b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70dae81c3d98828434f6d96df79c7cbd |
publicationDate | 2005-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2005227332-A |
titleOfInvention | Positive resist composition for immersion exposure and pattern forming method using the same |
abstract | PROBLEM TO BE SOLVED: To provide a positive resist composition for immersion exposure with improved pattern collapse, sensitivity, and immersion liquid followability, and a pattern forming method using the same. (A) A group having a specific structure in which a tertiary carbon atom is bonded to an ester bond as a group that decomposes by the action of an acid to produce an alkali-soluble group, and the solubility in an alkali developer is increased by the action of an acid. A positive resist composition for immersion exposure containing a resin and (B) a compound that generates an acid upon irradiation with actinic rays or radiation, and a pattern forming method using the same. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8211615-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8298745-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008153066-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8859180-B2 |
priorityDate | 2004-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 638.