http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005203595-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-06 |
| filingDate | 2004-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d036958f67006cd71f38b768ce926029 |
| publicationDate | 2005-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005203595-A |
| titleOfInvention | Electro-optical device manufacturing method, electro-optical device, and electronic apparatus |
| abstract | PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optical device capable of preventing a semiconductor substrate from being destroyed by heat treatment and improving manufacturing efficiency. By irradiating a semiconductor substrate 200 with a laser 630 having an absorption wavelength by the semiconductor substrate 200, the semiconductor substrate 200 is separated in a hydrogen ion implantation layer 205 of the semiconductor substrate 200. If the semiconductor substrate 200 is heated by laser irradiation, the semiconductor substrate 200 can be prevented from being destroyed by heat treatment. In addition, since heat generated by laser irradiation is transferred to the bonding interface between the semiconductor substrate 200 and the support substrate 500, the second heat treatment for improving the bonding strength is not necessary, and the manufacturing efficiency can be improved. it can. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009049387-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009042559-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010161359-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011233861-A |
| priorityDate | 2004-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.