| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24f54aefd7a75822ce9d6a7759e20068 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02T10-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F01N9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F01N3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F01N3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-94 |
| filingDate |
2004-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbbbc93db028cda43d8bdf5a9641a011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca9d28bb53d0aa2e451e0a5ef0a8c39e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d25545871eb2ba463f5984b0d66f04dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01bf0b7b47f938b6334d139fee46c3b5 |
| publicationDate |
2005-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005203362-A |
| titleOfInvention |
Plasma generating electrode and plasma reactor |
| abstract |
A plasma generating electrode capable of generating stable plasma with low input energy between unit electrodes facing each other and forming a partially strong electric field region uniformly. A plasma generating electrode (1) having two or more unit electrodes (2) facing each other and capable of generating plasma by applying a voltage between the unit electrodes (2), the unit electrodes facing each other 2 includes at least one of a plate-shaped ceramic dielectric 3 and a plurality of conductive films 4 disposed inside the ceramic dielectric 3 at a predetermined interval in the film thickness direction. And a plasma generating electrode 1 in which a plurality of through holes 5 penetrating in the film thickness direction are formed in at least one of the plurality of conductive films 4 constituting the unit electrode 2. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017016814-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2081417-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007116668-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2008123357-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3383144-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007103209-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012120677-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5150482-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8367966-B2 |
| priorityDate |
2003-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |