http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005197757-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36d1d9c59848bff6ad5f55923d1290f5 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2005-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00eca38aa371ab8099f122355777fdb2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_730510bf5ec2ab6d346241e7e3153bf8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a62edd758a3be6e81a3fa65b8181e503 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15809afbc5bdf797ffcb3a1c54aa62bc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31d56861a98a72c7307d497a258868de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_335b90cfa66bf90013c975d744a30cd5 |
| publicationDate | 2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005197757-A |
| titleOfInvention | Manufacturing method of semiconductor device |
| abstract | PROBLEM TO BE SOLVED: To provide a connection device having contact terminals that can be contacted at a high density and a high density with respect to an inspection object, and a method for manufacturing the same. A hole serving as a mold for forming a contact terminal 103 is formed by anisotropic etching of a silicon wafer. Using this mold, the contact terminal 103, an insulating film 104 made of a polyimide film, and a lead-out hole are formed. A wiring 105 is formed. Further, a silicon wafer that becomes the buffer layer 108 and the substrate 109 is sandwiched between the insulating film 104 and the wiring substrate 107 to be integrated, and the mold is removed. Thereafter, the lead-out wiring 105 is connected to the electrode 110 a of the wiring substrate 107 with the solder 111. [Selection] FIG. |
| priorityDate | 1994-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.