http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005194611-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2004-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15a7cf89a714e84897d321d6fc00bd1a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d24ef3d8321318cb2d85df9f383861ff |
| publicationDate | 2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005194611-A |
| titleOfInvention | Film pattern manufacturing method, conductive layer manufacturing method, electronic device manufacturing method, and electronic device |
| abstract | PROBLEM TO BE SOLVED: To provide a method for producing a high-definition and high-throughput film pattern and a method for producing an electronic device with no environmental load, low resources and low cost. The present invention includes a step of forming a monomolecular film on a substrate, a step of arranging a mask so as to contact at least a part of the monomolecular film, or a step of arranging a liquid, and the mask or And a step of supplying ozone to the monomolecular film which is not in contact with liquid or irradiating ultraviolet rays in the presence of oxygen. In addition, the present invention provides a method for manufacturing an electronic device using the method for manufacturing a monomolecular film pattern. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008021685-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009293082-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8563093-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010539332-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011063854-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4650521-B2 |
| priorityDate | 2004-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.