| abstract |
Even when a temperature difference occurs locally in a plasma generating electrode, it is possible to relieve thermal stress and effectively prevent distortion and breakage of the electrode due to temperature change, and uniform and stable. A plasma generating electrode and a plasma reactor capable of generating plasma and having excellent heat resistance are provided. At least one of electrodes facing each other includes a plate-shaped ceramic body serving as a dielectric, a conductive film disposed inside the ceramic body, and a holding member. One end portion (fixed end portion 5a) of the opposing electrode 2 is fixed in a cantilever state, and each of the electrodes 2 as a whole is in a cantilever state in which the directions are alternately different at predetermined intervals. The other end face (free end portion 5b) of the electrode 2 is brought into contact with the holding member 3 when the plasma electrode is assembled and / or when plasma is generated. [Selection] Figure 1 |