| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cef1f43aa7ea51e6a592082d9f2a3103 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49155
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49117
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49151 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y35-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q70-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate |
2004-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0b25a3acec94b74c9b38e1edcb551e0 |
| publicationDate |
2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005181324-A |
| titleOfInvention |
Method for manufacturing a probe for atomic force microscopy |
| abstract |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a probe having a molded tip portion which does not cause a problem in the prior art. A method of manufacturing a probe for atomic force microscopy includes the steps of preparing a semiconductor substrate 1, generating a mold on one surface of the substrate, and generating a probe structure on the one side. And attaching the holder 6 to the contact area. Here, the surface of each contact region is smaller than the surface of the holder region attached to the contact region. The method further includes releasing the structure including the probe structure and the holder from the substrate by under-etching the probe structure from the side of the substrate on which the probe structure is generated. The step of under-etching is performed after the step of attaching the holder. [Selection] Figure 3 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010038900-A |
| priorityDate |
2003-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |