| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-00 |
| filingDate |
2003-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_587775c2e54656b916ab8a22c9214dee |
| publicationDate |
2005-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005179587-A |
| titleOfInvention |
Film forming composition, film forming method, and silica-based film |
| abstract |
PROBLEM TO BE SOLVED: To provide a film forming composition suitable for an interlayer insulating film material capable of forming a film having a low dielectric constant and excellent surface flatness. The film-forming composition of the present invention comprises: (A) a hydrolyzed condensate obtained by hydrolyzing and condensing a silane compound containing a compound represented by the following general formula (1); (R 1 OCH 2 ) a Si (OR 2 ) 4-a (1) [Wherein, R 1 and R 2 represent a monovalent organic group, and a represents 1 or 2. ] (B) an organic solvent. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009119634-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1916283-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8728624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020189463-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11628079-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I452068-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008516019-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210015404-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102504356-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021095367-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020189463-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9907683-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10905576-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7816419-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10219925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5425759-B2 |
| priorityDate |
2003-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |