| abstract |
PROBLEM TO BE SOLVED: To provide a laser processing apparatus capable of controlling the periodic direction, light quantity, intensity distribution, etc. of a laser beam, a structure and an optical element generated by the laser processing method, and a laser processing method. A laser beam 101 emitted from a laser light source passes through a half-wave plate array 102 in which a plurality of half-wave plates are arranged to become a laser beam 103 whose polarization direction is controlled. Since the periodic structure formed by the laser light follows the polarization direction of the laser light, the laser light 103 changed to a plurality of polarization directions can form a plurality of fine periodic structures on the workpiece 105. Further, by using an ND filter, a gray mask, a Gaussian filter, or the like, the amount of laser light, the intensity distribution, and the like can be controlled. [Selection] Figure 1 |