| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f278bf3e3bd12896f71fc0e87dd1684 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K11-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J5-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01K7-02 |
| filingDate |
2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b7479991db841ee145079a14e4feaa3 |
| publicationDate |
2005-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005147976-A |
| titleOfInvention |
Temperature measuring device, chuck monitor and plasma processing device |
| abstract |
A temperature measuring device having a simple configuration capable of accurately measuring temperature without being affected by an electromagnetic wave as a disturbance. The temperature measuring device of the present invention is a temperature measuring device provided with an infrared type temperature measuring unit 6 for measuring the temperature of a substrate 10 in a predetermined processing tank. Between the board | substrate 10 and the infrared type temperature measurement unit 6, it is comprised so that the temperature of the shielding part 8 which consists of the material which interrupts | blocks infrared rays, and was comprised so that contact with the board | substrate 10 could be measured by the infrared type temperature measurement unit 6 Has been. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020059722-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010533863-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102737934-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014092528-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102737934-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20160076457-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020059722-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112689887-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009121982-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7034324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101968800-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016119412-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847350-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016177450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010038616-A |
| priorityDate |
2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |