Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0096 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
filingDate |
2004-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04ec287bdbb96520e99345389403a9b7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93c9f2e38c3a1420ec4477591448f333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b295731f3bdb1a3d0fc9555846f3c997 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75d9b0e58ce5a4426ca989e1fa04c3e4 |
publicationDate |
2005-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2005144660-A |
titleOfInvention |
Method for reducing adhesion of MEMS and apparatus with anti-adhesion coating |
abstract |
A method for reducing adhesion of MEMS and a MEMS device with anti-adhesion coating are provided. A method of forming an anti-adhesion layer on the surface of an apparatus, in which a coating material 24 is supported on a cap wafer 21, and the cap wafer and the MEMS wafer 41 are formed into a single hollow space. To join. Thereafter, the coating material is evaporated to coat at least a part of the surface of the MEMS wafer. [Selection] Figure 4 |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009072907-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011524816-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015502265-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8901684-B2 |
priorityDate |
2003-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |