http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005140865-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G69-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G69-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-037 |
| filingDate | 2003-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50c05e1481593cf7a7f31bbf076799e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcc1217353063f827eadb911fe675e72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1512e632b2dd75442d3e4f65473c85eb |
| publicationDate | 2005-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005140865-A |
| titleOfInvention | Positive photosensitive resin composition and semiconductor device |
| abstract | PROBLEM TO BE SOLVED: To provide a positive photosensitive resin composition having high sensitivity and high resolution. SOLUTION: 100 parts by weight of an alkali-soluble resin (A), 1 to 50 parts by weight of a photosensitive diazoquinone compound (B) and 1 to 30 parts by weight of a phenol compound (C) having a structure represented by the general formula (1) It is a positive photosensitive resin composition characterized by the fact that it has high sensitivity with the characteristics that there is little film loss, there is no collapse of the pattern shape, and there is no residual (scum) of the photosensitive resin composition in the exposed area, In addition, it has an excellent feature of high resolution. Embedded image |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101067090-B1 |
| priorityDate | 2003-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 96.