| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02 |
| filingDate |
2004-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6557f8f38fef5e970aff414b5b73cd4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bba022755b00dd3565ebe341cafffca0 |
| publicationDate |
2005-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005136429-A |
| titleOfInvention |
Composition for forming silica-based film, silica-based film and method for forming the same, and electronic component provided with silica-based film |
| abstract |
PROBLEM TO BE SOLVED: To provide a composition for forming a silica-based film which is excellent in low dielectric property and has sufficient mechanical strength and can form a silica-based film that can be cured at a lower temperature and in a shorter time than conventional. A component (a): a siloxane resin obtained by hydrolytic condensation of a compound represented by the general formula (1); a component (b): an organic solvent containing at least one aprotic solvent; (C) component: a silica-based film-forming composition comprising an onium salt, wherein the aprotic solvent is at least one aprotic selected from the group consisting of ether solvents and ketone solvents A composition for forming a silica-based film, which comprises an organic solvent. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864898-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007111271-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10544329-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007254677-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8784985-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8901268-B2 |
| priorityDate |
2004-11-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |