http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005132765-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3867300c6479676fa2d8a611c42e1eb0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2003-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c1531089443c6242cddcf8f9f8b7ee4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc25a38e17870169ee45b1ca80d48d34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b2d2b7038d3e1098d26cbd68ea85ee3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a2d30c22061ccbe87d923a89550e44d |
| publicationDate | 2005-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005132765-A |
| titleOfInvention | Novel compound, Al-based film forming material, Al-based film forming method, Al-based film and semiconductor element |
| abstract | PROBLEM TO BE SOLVED: To provide an Al-based film having good in-plane uniformity and excellent step coatability. An Al-based film forming material of a compound represented by the following general formula [I]. Formula [I] H 3 Al: L k [In the general formula [I], k is 1 or 2, and L is a cyclic amine represented by the following general formula [II]. ] Formula [II] [However, in General Formula [II], R 7 is H or a hydrocarbon group, and R 1 to R 6 are H or a hydrocarbon group. R 1 to R 7 may be the same as or different from each other. ] |
| priorityDate | 2003-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.