http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005132733-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C275-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2003-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4b796e240bd95e9009021cdd052a7ce http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f853984c85e67773ba6e4556eadbb0f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c35d46618ed9f8e9ead456a9d0cd4699 |
| publicationDate | 2005-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005132733-A |
| titleOfInvention | Resist compound and radiation-sensitive composition |
| abstract | The present invention provides a resist compound and a radiation-sensitive composition that can be used not only for ultraviolet light such as i-line and g-line but also for radiation such as KrF, ArF excimer laser light, electron beam, and X-ray. Provided is a high-sensitivity, high-heat resistance, solvent-soluble, non-polymeric radiation-sensitive resist having a lower molecular weight and higher resolution than conventional materials. A radiation-sensitive composition comprising a compound represented by the following formula, and two or more of the compounds and an acid generator. (A is a hydrocarbon group, acyl group or sulfonyl group, R 1 is hydrogen or an acid-dissociable functional group, R 2 is hydrogen or an acyclic hydrocarbon group, l is 1 to 2, m and n are 1 Represents ~ 3) [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022045365-A1 |
| priorityDate | 2003-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 129.