http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005126768-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cfa11ef6f0c5577b4612b415ff30253 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B41-87 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C15-00 |
| filingDate | 2003-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef53bf2f77e0aa750ac231fc1c99517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc0db112cfb3d9d247d46615fbcbfaf8 |
| publicationDate | 2005-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005126768-A |
| titleOfInvention | Thermal spray film forming method and composite material manufacturing method |
| abstract | PROBLEM TO BE SOLVED: To provide a method for forming a protective film and a method for producing a composite material capable of preventing the occurrence of microcracks on the surface of a ceramic material and preventing the plasma-resistant protective film from peeling off. In a method for forming a sprayed film, the method includes a roughening step for chemically roughening a surface of a brittle material and a thermal spraying step for spraying a protective film on the surface of the brittle material. The thermal spray film forming method is characterized in that the arithmetic average roughness (Ra) of the surface of the roughened brittle material is 1 to 10. When a ceramic sintered body is used as the brittle material, an acidic etching solution such as sulfuric acid or phosphoric acid can be used. When quartz is used as the brittle material, a chemical frost treatment agent can be used. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006114915-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014122418-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2020090613-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7085015-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020090613-A1 |
| priorityDate | 2003-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.