http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005093857-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e4e30ee76c0451e6f386bb7f1f8bf30e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-52 |
| filingDate | 2003-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_678ff41f06fe1fb9d68e701b0a5806ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c42e9e318bba02ea89c2bdd65b63800 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33587f1a93a9517b6ccc95e2035f894d |
| publicationDate | 2005-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005093857-A |
| titleOfInvention | Bonding head, bonding apparatus and bonding method |
| abstract | 【Task】 To provide a bonding head, a bonding apparatus and a bonding method for ultrasonic high-temperature bonding. 【Constitution】 A bonding head comprising an ultrasonic vibrator, a vibration horn, a light heating device that condenses halogen lamp light with a lens and irradiates the vibration horn, and a mounting member that connects the vibration horn and the light heating device. The light heating device moves integrally with the vibration horn, and the region irradiated with light is constant regardless of the movement of the vibration horn. In this region, a surface treatment is applied to help absorb light, and the temperature is 100 to 300 ° C. To be heated. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010183105-A |
| priorityDate | 2003-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.