http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005084238-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F214-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2003-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_464180103f87187b3aab20511a8537b7 |
| publicationDate | 2005-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2005084238-A |
| titleOfInvention | Positive resist composition and pattern forming method using the same |
| abstract | PROBLEM TO BE SOLVED: To provide a positive resist composition suitable for use with an exposure light source of 160 nm or less, particularly F 2 excimer laser light (157 nm), specifically, a positive resist composition in which development defects are suppressed. And a pattern forming method using the same. (A) A fluorine-containing resin having a structure in which a main chain of a polymer skeleton is substituted with a fluorine atom and a group represented by a specific structure, which is decomposed by the action of an acid and has increased solubility in an alkali developer , (B) a compound that generates an acid upon irradiation with an actinic ray, and (C) A positive resist composition containing at least two kinds of basic compounds and a pattern forming method using the same. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008083196-A |
| priorityDate | 2003-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 462.