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filingDate 2003-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_594840edf8e0117b2287f30afbd82e76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4544a78ec7291cec8b894632b76e8985
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65f475edba57c29d144d24aa4bece882
publicationDate 2005-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2005084143-A
titleOfInvention Method for forming inorganic alignment film, inorganic alignment film, substrate for electronic device, liquid crystal panel and electronic apparatus
abstract To provide an inorganic alignment film that is excellent in light resistance and capable of generating a pretilt angle, and to provide a substrate for an electronic device, a liquid crystal panel, and an electronic apparatus provided with such an inorganic alignment film. Moreover, the formation method of such an inorganic alignment film is provided. A method of forming an inorganic alignment film according to the present invention is a method of forming an inorganic alignment film mainly composed of an inorganic material on a substrate, the surface of the substrate on which the inorganic alignment film is formed, from a direction inclined by a predetermined angle theta b with respect to the vertical direction of the surface, the milling step of irradiating an ion beam onto a substrate irradiated with ion beams, to have a film forming step of forming an inorganic alignment film It is characterized by. Predetermined angle theta b in the milling step is 2 ° or more. The acceleration voltage of the ion beam when irradiating the ion beam in the milling process is 400 to 1400V. [Selection] None
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015045786-A
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priorityDate 2003-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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