| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26 |
| filingDate |
2003-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e684a1c1bb872a53f9ea3766471a828f |
| publicationDate |
2005-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2005079336-A |
| titleOfInvention |
Heat treatment apparatus, heat treatment method, and semiconductor device manufacturing method |
| abstract |
PROBLEM TO BE SOLVED: To provide a low-cost heat treatment apparatus and heat treatment method capable of obtaining a desired temperature distribution over the entire region of a large substrate to be processed. SOLUTION: A processing chamber 2 for storing a substrate 1 to be processed and a plurality of rod-shaped lamps Q i (i = 1 to 1) arranged (arranged) at the same pitch in a fixed direction and irradiating the substrate 1 with ultraviolet light. n), a detector D ij (i = 1 to n; j = 1 to m) for receiving the ultraviolet light of the rod-shaped lamp Q i through the substrate 1 and light intensity distribution, The control circuit unit 4 feeds back the voltage value of the intensity to the power supply voltage and controls the outputs of the rod-shaped lamps Q i independently and simultaneously. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017045983-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I621374-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014507064-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8309421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013207152-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012071130-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012071130-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9482468-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011204742-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103222033-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9279727-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102587053-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009508337-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8693857-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101209524-B1 |
| priorityDate |
2003-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |